Latest Advances in PLD Techniques
During the 1990’s and early 2000’s Drs. Koinuma and Kawasaki developed a combinatorial PLD system which enabled
researches to produce and evaluate many more high quality samples in much less time.
Yet another plasma plume
Using this system of sliding masks and multiple targets, researchers can choose any size and shape of mask, and
choose any combination of targets to pile a single atom on each pixel in a substrate according to their epitaxial
design. By means of a Scanning RHEED the research can observe the surface structures and thickness of layer
accumulation in real time.
This process has been widely acclaimed not only for its efficiency, but even more importantly for the uniformity
of film depth and consistent high quality of the samples produced.
Drs. Koinuma and Kawasaki also have recently developed a PLD system for large samples up to 3” in diameter,
which consistently produces the same high quality results.